硅微机械陀螺仪的机电接口模型分析  

Analyses on Electromechanical Interface Model of Silicon Micromachined Gyroscope

作　　者：杨波[1] 苏岩[1] 施芹[1] 周百令[1] 

机构地区：[1]东南大学仪器科学与工程系,南京210096

出　　处：《中国惯性技术学报》2005年第5期49-53,57,共6页Journal of Chinese Inertial Technology

基　　金：总装备部十五国防预研课题(41308050109);国家高技术研究发展计划(863计划)(2002AA812038)

摘　　要：建立了某种硅微机械陀螺仪的电路模型,分析了寄生电容对接口电路的影响。结果表明,合理的接口电路不仅消除了大部分的寄生电容的影响,而且减小了信号的衰减幅度,抑制了大部分的耦合信号和噪声信号。最后对接口电路进行了改进,除了保留以上的一些优点外,还减小了载波信号的变化和电源变化对电容分辨率的影响,提高了整个电路的分辨率。The electromechancial interface model of silicon micromachined gyroscope is established. The impacts of these parasitic capacitances on interface circuit are analyzed. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, reduce the attenuation of signal, restrain the noise signal and coupling signal. Finally the interface circuit is improved. The results show that besides these merits mentioned above, it can also reduce the impacts of the changes of carrier wave and power supply on resolution and improve the resolution.

关 键 词：硅微机械陀螺仪 机电接口模型 寄生电容 分辨率 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]