生产型管式PECVD设备  

Tube type PECVD of Production Model

作　　者：宋玲[1] 刘恺[1] 杨彬[1] 陈必雄[1] 

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2005年第11期34-36,54,共4页Equipment for Electronic Products Manufacturing

摘　　要：太阳能电池作为新一代的绿色安全、无污染、长寿命的能源,已经广泛在欧洲等发达国家的军民行业中应用并在我国迅速推广。论述了由中国电子科技集团公司第四十八研究所研制的生产型管式PECVD设备的原理、构成及特点,并对其工艺结果进行了讨论。该设备已在国内太阳能电池生产线上运行近一年,其可靠性高,成膜均匀性好,得到了用户的好评。As the new energy of green, safe, no pollution and long life, the solar cell already widely used in the military and civilian ways in the developed country and rapidly promoted in China. The solar cell ultimate output surpassed 30% speed rapid growth by the yearly rate in the world in recent years. The production model PECVD is regarded as the key process of the production line of the solar cell. Our country relies on the import continuously. The result comes to shows that this system reliability, film thick uniformity are good and obtains user＇s high praise for one year on the solar cell production lines.

关 键 词：PECVD 太阳能电池 多晶硅 

分 类 号：TN304.055[电子电信—物理电子学]