宏—微操作结合的自动微装配系统  

A Microassembly Workcell with Macro to Micro Automatic Operations

作　　者：宗光华[1] 孙明磊[1] 毕树生[1] 余志伟[1] 于靖军[1] 

机构地区：[1]北京航空航天大学,北京100083

出　　处：《中国机械工程》2005年第23期2125-2130,共6页China Mechanical Engineering

基　　金：国家863高技术研究发展计划资助项目(2002AA404460;2004AA404260);国家自然科学基金资助项目(50475002);国家"十五""211"学科建设资助项目

摘　　要：介绍了一类具有宏—微尺度结合特点的操作对象,对该类型操作对象的操作任务进行了分析。开发了用于PMMA微流控芯片批量化生产的微对准自动装配系统,该系统采用基于显微视觉图像分析的分视场对准机理。系统的主要硬件构成包括机械本体、视觉单元、4-DOF精密定位单元和全自动气动辅助单元。介绍了系统的控制结构。提出针对标记图像的对准精度测量方法,通过实验得到系统的对准精度为2.9μm。该系统可以高效、可靠地完成PMMA微流控芯片的微对准装配。This paper reported on a workcell developed for micro--alignment automation of manu facturing PMMA micro-fluidic chip. The workcell integrated techniques of micro-vision servoing, precise positioning and micro pickup. With the chip＇s external characteristics of “macro to micro”scale, the manipulating tasks of the system were analyzed. The entire hardware of the system consists of a double-view imaging unit, a 4-DOF fine positioning unit and a pneumatic driven auxiliary motion unit. Method of measuring alignment accuracy was put forward. Experimental results confirm the alignment accuracy and the workcell can reach 2.9μm and can do micro-alignment assembly tasks efficiently and reliably for industrial applications.

关 键 词：微装配 微流控芯片 对准精度 分视场 

分 类 号：TP242.6[自动化与计算机技术—检测技术与自动化装置]