平面工艺空间带电粒子探测器的研制  

Development of planar technology space charged particle detector

作　　者：谭继廉[1] 靳根明[1] 段利敏[1] 王宏伟[1] 袁小华[1] 卢子伟[1] 张金霞[1] 鲍志勒[1] 王柱生[1] 李存璠[1] 宁宝俊[2] 田大宇[2] 王玮[2] 张录[2] 高萍[3] 王月[3] 王世金[3] 朱光武[3] 梁金宝[3] 

机构地区：[1]中国科学院近代物理研究所,甘肃兰州730000 [2]北京大学微电子所,北京100871 [3]中国科学院空间科学与应用研究中心,北京100080

出　　处：《核电子学与探测技术》2005年第6期580-583,共4页Nuclear Electronics & Detection Technology

摘　　要：描述了用平面工艺+离子注入技术制备新型空间带电粒子探测器的工艺技术及器件的特性。探测器的灵敏层厚度为100、300、450和1000μm,灵敏面积为(?)8和(?)12mm等不同规格。在全耗尽偏压下,得到典型的反向漏电流范围为0.57-10.11nA,典型的能量分辨率为0.69%-0.86%(对241Amα粒子)。在60℃高温下,器件的性能变化在空间应用的允许范围之内。The fabrication technology and performances of new type space charged particle detectors fabricated by using planar technology and ion implanted technique were described, the sensitive areas were φ8mm, φ12mm and the thicknesses were 100 μm, 300μ m, 450 μ m and 1000 μm respectively. At the full deplation bias the typical leakage current ranging of 0.5-10. 11 nA and typical energy resolution ranging of 0. 69%-0. 86% （for ^211Am α-particles ）were obtained. At the temperature of 60 ℃ the variating of performances was allowable for space application.

关 键 词：平面工艺 离子注入 空间 带电粒子 探测器 

分 类 号：TL814[核科学技术—核技术及应用]