用激光干涉法制备平面调制靶的表面起伏图形  

PREPARATION OF SURFACE PERTURBATION FIGURES FOR TARGETS BY LASER INTERFERENCE

作　　者：陈建荣[1] 王珏[1] 陈玲燕[1] 沈军[1] 杜保旗[1] 周斌[1] 秦树基[1] 陈家华[1] 

机构地区：[1]同济大学波耳固体物理研究所,同济大学化学系

出　　处：《原子能科学技术》1996年第1期25-30,共6页Atomic Energy Science and Technology

基　　金：国家高技术惯性约束聚变资助

摘　　要：表面起伏靶是惯性约束聚变（ＩＣＦ）分解实验中的重要实验用靶。采用激光干涉方法制备初始微扰振幅和波长分别在几和几十微米范围内的正弦调制形状，摸索了相应的工艺条件和工艺过程。用台阶仪及光学显微轮廓仪观测微加工后的形貌。探讨了调制波长的精确控制与干涉工艺之间的关系，并用电镀工艺转移图形得到用于压制的模具。The surface perturbation target is one of the most important experimental taxgets for the resolved experiments of inertial-confinement fusiom (ICF). In the paper, the preparation of the sine modulated perturbation figures with perturbation amplitude and wavelength of about several and tens of micron respectively with the method of laser interference is reported. The perturbation profiles of the figures are investigated by an alpha-step device and an optical microscopic profiler. Different technological conditions, preparation process and their relationship with the quality of the figures are studied. Also, the mold with sine perturbation surface is obtained by electro-chemical plating.

关 键 词：平面靶 正弦起伏 激光干涉 核靶 惯性约束聚变 

分 类 号：TL632.1[核科学技术—核技术及应用]