化爆材料瞬态切削温度的NiCr/NiSi薄膜热电偶温度传感器的研制  

DEVELOPMENT OF THIN-FILM THERMOCOUPLE FOR MEASUREMENT OF WORKPIECE TEMPERATURE IN CHEMICAL EXPLOSIVE MATERIAL MACHINING

作　　者：曾其勇[1] 孙宝元[1] 徐静[1] 贾颖[1] 崔云先[1] 邓新禄[2] 徐军[2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]大连理工大学三束国家重点实验室,大连116024

出　　处：《机械工程学报》2006年第3期206-211,共6页Journal of Mechanical Engineering

基　　金：中国工程物理研究院重大基金资助项目(200120301)

摘　　要：针对化爆材料的切削特点,研制出一种集切削和测温功能于一体的NiCr／NiSi薄膜热电偶快速响应温度传感器。用多弧离子镀将NiCr/NiSi热电偶薄膜直接镀于高速钢刀头内。薄膜热电偶电极与高速钢之间采用最先进的多层镀膜法绝缘,即用微波ECR等离子体源增强射频反应非平衡磁控溅射技术首次成功在W18Cr4V高速钢基底上沉积绝缘性能良好的SiO2膜。对研制的薄膜热电偶温度传感器进行了静态和动态标定,结果表明传感器在0- 600℃测温范围内具有很好的线性和热稳定性,而且响应快,时间常数小于0．8 ms。热电偶薄膜与绝缘膜、绝缘膜与基体之间有足够的附着强度。该温度传感器已安装在现场使用,为国防工业部门的高效、安全生产提供了有力的保障。In allusion to the features of cutting chemical cxplosive material, a new type of fast response temperature sensor --NiCr/NiSi thin film thermocouple is developed, which integrates both cutting and temperature measuring functions. The NiCr/NiSi thin-films are plated directly inside a high speed steel cutter. A SiO2 insulating layer between the thin-films and high speed steel substrate is deposited by Microwave ECR Plasma source enhanced reactive RF magnetron sputtering for the first time. Static and dynamic calibrations for the thin-film thermocouple are carded out. It is concluded that the temperature sensor has good linearity and thermal stability within the temperature range and can response very fast. Its response time is only 0.8 ms. The NiCr/NiSi thin-film and insulating film are deposited onto the curer strong enough. The thin-film therrnocouple sensor is being used in China Academy of Engineering Physical, which provides efficient and safe production for war industry enterprise.

关 键 词：薄膜热电偶 切削温度 磁控溅射 离子镀 化爆材料 

分 类 号：TH81[机械工程—仪器科学与技术]