真空微电子平板显示器工艺研究  

Research on the Process of Vacuum Microelectronic Flat-Panel Displays

作　　者：皇甫鲁江[1] 朱长纯[1] 淮永进[1] 铁执玲[1] 单建安[1] 郭彩林[1] 

机构地区：[1]西安交通大学真空微电子研究所,香港科技大学,电子部4400厂

出　　处：《电子学报》1996年第11期119-121,共3页Acta Electronica Sinica

基　　金：国家自然科学基金

摘　　要：本文介绍了我们最近开发的真空微电子平板数码管工艺，主要包括阳极支柱（阵列）的制作和平板透明真空封装。利用上述工艺已经制成了平板数码营，其栅阴特性理想，阳阴之间也能测得明显的场致发射特性并伴有荧光激发。目前，数码管玻壳内真空度的维持等还存在问题，文章最后分析了其原因。The process developed recently for vacuum microelectronic flat-panel nixie is introduced,including mainly how to fabricate the anode pillars(array)and the transparent flat-panel vacuum packages.Flat-panel nixies have been fabricated by the processing.TheⅠ-Ⅴ characteristic between gates and cathodes is ideal.Field emission characteristic,accompanied with fluorescence light,is also detected between cathodes and anodes.There are still some problems in maintaining the vacuum in package.The reasons are analyzed at the last part of the paper.

关 键 词：场致发射 平板显示器 真空微电子器件 

分 类 号：TN873.91[电子电信—信息与通信工程]