MEMS的微细加工技术  

Micro-fabrication Technology of MEMS

作　　者：戴亚春[1] 周建忠[1] 王匀[1] 马欣涛[1] 

机构地区：[1]江苏大学机械工程学院机制系,江苏镇江212013

出　　处：《机床与液压》2006年第5期15-19,共5页Machine Tool & Hydraulics

基　　金：江苏大学高级人才启动基金项目

摘　　要：介绍了目前比较前沿的几种微型腔的机械加工方法:光刻掩模、高能束刻蚀(激光刻蚀)和LIGA技术等加工方法。对这些技术的发展趋势进行了展望。指出微器件的推广和应用,是和微器件的加工方法密不可分的,特别是随着激光加工技术在微机械加工领域的推广和应用,微器件的加工工艺水平和加工质量会有更大的提高。MEMS （ Micro Electromechanical System） technology is presently on its way to become an impulse for the development of mierosystem manufacturing process and its application. Enhanced micro - mechanical manufacturing approaches including optical li- thography mask, laser etching and LIGA, were introduced. Furthermore, the development tendency of these technologies was discussed. It was pointed out that the application of laser manufacturing technology in the micro - mechanical manufacturing range will open up opportunities for increasing the new micro - mechanical manufacturing methods.

关 键 词：微型机械 微成形 MEMS 光刻掩模 激光刻蚀 LIGA 激光加工技术 

分 类 号：TN305.7[电子电信—物理电子学]