大口径光学件误差均化拼接技术  

Large aperture optical components of stitching technique by error averaging

作　　者：程刚[1] 蒋世磊[2] 

机构地区：[1]中国矿业大学机电工程学院,江苏徐州221008 [2]中国科学院光电技术研究所,四川成都610209

出　　处：《光电工程》2006年第6期118-120,129,共4页Opto-Electronic Engineering

摘　　要：运用子孔径检测及拼接的方法可完成大口径光学件面形的干涉测量。为了能够减少子孔径拼接的误差累积与数据处理算法带来的精度影响,运用子孔径拼接的误差拼接算法,并通过对实验检测数据的处理,得到拼接结果与全孔径检测结果比较,面形波面峰谷值相差0.084,均方根值相差0.01,误差在Veeco光学干涉测量仪器的公差范围内。实验结果验证了误差均化算法可有效减少误差的传递与累积,实现子孔径拼接技术对大口径光学件的正确检测。The large aperture optical components can be measured by stitching technique. In order to reduce its accumulation error and improve the precision, error averaging method can be used to solve these questions in the experiments. By comparing the result of stitching interferometer with the whole plane, the difference of Peak-Valley is only 0.084（λ equals to 633nm） and the number of root mean square is only 0.01λ. The difference of the results is in the tolerance of measure equipment （Veeco）. From the study of experiment＇s result, the error averaging method is the effective method to reduce the transfer and accumulation of error caused by the stitching theory in testing the large aperture optical components.

关 键 词：子孔径拼接 大口径光学件 误差均化法 面形测量 

分 类 号：TN247[电子电信—物理电子学]