纳米氧化镧对电铸电极材料抗电蚀性的影响  

Influence of Nanometer La_2O_3 on Electrical Erosion Resistance of Electroformed Electrode Materials

作　　者：明平美[1] 朱荻[1] 曾永彬[1] 朱健[2] 贾世星[2] 

机构地区：[1]南京航空航天大学机电学院 [2]南京电子器件研究所,江苏南京210016

出　　处：《稀土》2006年第3期20-23,64,共5页Chinese Rare Earths

基　　金：江苏省自然科学项目资助(BK2002206)

摘　　要：增强工具电极材料的耐电蚀能力,降低电极损耗是微细电火花加工技术可靠、稳定且高效制造高深宽比微结构和器件的研究关键之一。选用纳米量级稀土氧化物-氧化镧为电铸基液添加剂制备了微工具铜电极材料,探讨了它的作用机理,分析了电铸铸层的微观形貌,并实验研究了纳米氧化镧添加剂对电铸电极材料抗电蚀性能的影响,优选了电沉积工艺参数。结果表明:添加适量纳米氧化镧添加剂并在适当电沉积条件下,电铸铜电极材料表现出较强的抗电蚀能力,且综合机械性能优异。Enhancing electrical erosion resistance of tool electrode and reducing electrode wear is one of research keys to fabricate HARMs with micro EDM technology reliably, stably and efficiently. This poper fabricated copper tool electrode material with nano-La2O3 additive, discussed the role mechanism of additive, analyzed the appearance of electroformed coating,studied the influence of nano-La2O3 additive on electrical erosion resistance of tool electrode materials,and optimized electrodeposition parameters. The results show that copper electrode materials electroformed with nano-La2O3 additive exhibit excellent electrical erosion resistance and good mechanism under proper electrode- position conditions.

关 键 词：电铸 抗电蚀性 纳米氧化镧 稀土 

分 类 号：O614.33[理学—无机化学] TG133.4[理学—化学]