一种MEMS自动微装配机器人  

Automatic microassembly robot for MEMS

作　　者：谢晖[1] 孙立宁[1] 荣伟彬[1] 陈立国[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,哈尔滨150001

出　　处：《哈尔滨工业大学学报》2006年第7期1013-1016,共4页Journal of Harbin Institute of Technology

基　　金：国家高技术研究发展计划资助项目(2002AA404450).

摘　　要：介绍用于MEMS自动微装配的机器人系统的构成,讨论组成该系统的若干关键技术,包括宏/微精密定位技术、显微视觉系统、微夹持器的设计、系统的标定以及装配策略．集成各单元技术,以外径＜2 mm的微行星齿轮减速器为示范装配对象,研制能够完成微装配任务的微装配机器人．融合显微视觉和力信息,采用相应的装配策略,在2．5 min内,实现难度最大的3个行星齿轮的自动装配．The structure of the robot system for MEMS automated assembly is presented. Key technologies that comprise the assembly system are discussed, including the technologies of coarse-to-fine positioning, micro-vision system, the design of micromanipulator, system calibration and tasks planning. Integrated with the key technologies, a micromanipulation system was developed to complete the automated assembly of the miniatur- ized planetary reducer with an outer diameter of 2 mm. By fusing the micro-visual and micro-force feedback data and applying special assembly strategy, the automated assembly of three planetary gears within 2. 5 minutes is validated by experiment.

关 键 词：微装配机器人 MEMS 自动装配 微行星齿轮减速器 

分 类 号：TP242.2[自动化与计算机技术—检测技术与自动化装置]