MEMS固体微推进器中Cr薄膜点火电阻的研究  

Research on the Cr Membrane Igniting Resistance in MEMS Solid Propellant Micro-Thruster

作　　者：徐超[1] 李兆泽[2] 万红[1] 吴学忠[2] 

机构地区：[1]国防科技大学航天与材料工程学院,长沙410073 [2]国防科技大学机电工程与自动化学院,长沙410073

出　　处：《传感技术学报》2006年第05A期1411-1414,1418,共5页Chinese Journal of Sensors and Actuators

摘　　要：点火电路是MEMS固体化学微推进器中最重要的组成部分,其点火电压的大小及点火可靠性则主要取决于点火电阻.国内外均采用多晶硅(polysilicon)或贵金属铂(Pt)作为点火电阻材料,所制备出来的点火电阻的阻值都比较大,需要的点火电压较高(40V以上),而且点火可靠性不高,难以满足固体微推进器的使用要求.本文首次采用金属铬(Cr)作为点火电阻材料,设计了具有高可靠性的并联点火电阻图形,通过磁控溅射镀膜、光刻以及Cr的湿法腐蚀工艺制备出了Cr薄膜点火电阻,并在20伏左右的低电压下成功地实现了常规火药黑索金的点火,为低点火电压、低成本、高可靠性的点火电路的制备提供了一条有效的技术途径.Igniter is the most important part of MEMS solid propellant micro-thruster, and its igrating voltage and igniting reliability are mainly decided by the igniting resistance. Polysilicon and Pt are the two main materials for the igniting resistance. As the resistance is usually very high, the igniters need higher voltage （over 40 voltages） to work, and their igniting reliabilities are not high enough, which can＇t meet the requirements of the micro-thruster. Cr is chosen as the igniting resistance material for the first time, and a new highly reliable parallel connection resistance shape is designed. The Cr membrane igniting resistance is fabricated by the process of magnetron-sputtering, lithography, and wet etching, and it can successfully ignite the common powder RDX at the low voltage of 20 voltages, which provides an effective way of fabrication of the igniters which have lower igniting voltage, lower cost and higher igniting reliabilities.

关 键 词：MEMS 微推进器 点火电阻 铬薄膜 点火电压 

分 类 号：TM38[电气工程—电机] TN43[电子电信—微电子学与固体电子学]