一种低成本光通信用MEMS可变光衰减器  

Low Cost MEMS Variable Optical Attenuator for Optical Telecommunication Application

作　　者：李海军[1] 杨拥军[1] 王建军[2] 徐永青[1] 郑七龙[1] 陈维友[3] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [3]吉林大学电子科学与工程学院集成光电子学国家重点实验室吉林大学实验区,长春130023

出　　处：《传感技术学报》2006年第05A期1731-1734,共4页Chinese Journal of Sensors and Actuators

摘　　要：介绍了一种采用新型体硅微机械加工工艺研制的低成本光通信用微机械可变光衰减器.根据光通信系统对可变光衰减器的插入损耗低、动态衰减范围大、响应时间短等技术要求,对器件的机械模型结构和光耦合模型结构进行了分析.测试表明器件的动态衰减范围≥50dB,插入损耗≤0.8dB,回波损耗≤-45dB,波长相关损耗≤0.2dB,偏振相关损耗≤0.25dB,响应时间<1ms.This paper presents a low cost MEMS variable optical attenuator（VOA） fabricated by a novel bulk-silicon micromachining technology for the optical communication applications. According to the specifications such as low insertion loss, large attenuation range, high responding speed and so on, which are demanded in optical communications for VOA, the mechanical and optical models of the designed VOA are employed for the optimization design of the structures. Performance measurements of the fabricated VOA shows that the insert loss≤0. 8 dB, the attenuation range≥50 dB, the return loss≤-45 dB, the wavelength dependent loss≤0. 2 dB, the polarization dependence loss≤0. 25 dB and the responding time〈1ms.

关 键 词：微机械 光学微机电系统 可变光衰减器 波分复用 

分 类 号：TN253[电子电信—物理电子学]