新型MEMS光学电流传感器的设计  

Design of Novel Optical Current Sensor Based on MEMS

作　　者：赵本刚[1] 刘玉菲[1] 徐静[1] 高翔[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室

出　　处：《半导体光电》2006年第5期534-538,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金资助项目(60572022)

摘　　要：提出了一种用于检测50Hz高压交流电的新型MEMS光学电流传感器。详细介绍了器件的敏感与光学检测原理，给出了器件结构、温度补偿、滤波和工艺的设计过程，并模拟分析了器件在交流电100～3600A下的性能。结果表明：滤波后可得到稳定的测量光信号；温度变化±50K时相应的测试误差为0．2％；器件在大电流下的灵敏度优于0．02dB／A。A novel micro-electronic mechanic system（MEMS）-optical current sensor used to detect 50 Hz high alternating current is proposed. Theory about sensing and optical test of the device is explained in detail. The design of structure, temperature compensation, filtering and fabrication are shown. Finally, the performance of the device at alternating current of 100～3 600 A is simulated and analyzed. The results show that steady optical output signal can be received by filtering; when the temperature varies 50 K, measurement error of the devices is 0. 2%, and sensitivity at high current is more than 0.02 dB/A.

关 键 词：微电子机械系统 光学电流传感器 扭转微镜 双光纤准直器 滤波 温度补偿 

分 类 号：TM452.93[电气工程—电器]