梳状音叉MEMS陀螺非随机误差分析  

Analysis of Non-Stochastic Errors in Comb-Drive Tuning Fork MEMS Gyroscopes

作　　者：李荣冰[1] 刘建业[1] 林雪原[1] 华冰[1] 刘瑞华[2] 

机构地区：[1]南京航空航天大学导航研究中心,南京210016 [2]中国民航学院天津市智能信号与图像处理重点实验室,天津东丽区300300

出　　处：《电子科技大学学报》2006年第6期928-931,共4页Journal of University of Electronic Science and Technology of China

基　　金：国家自然科学基金资助项目(60472125);国防科技预研基金资助项目(514090301);航空科学基金资助项目(04D52030)

摘　　要：研究了一种典型结构的梳状音叉MEMS陀螺的非随机性误差特性。综合考虑梳状音叉MEMS陀螺质心偏移、硅的非等弹性等因素,分析该陀螺中的非随机性干扰力矩;从二阶欠阻尼控制系统的角度,讨论了干扰力矩在陀螺内调制、解调环节下对输出的影响;推导出开环灵敏度随温度、比力和角速度的变化关系。在一定近似条件下,得到梳状音叉MEMS陀螺非随机性误差模型的形式。Analysis of Non-Stochastic Errors in Comb-Drive Tuning Fork MEMS Gyroscopes LI Rong-bing1, LIU Jian-ye~, LIN Xue-yuanI, HUA Bing~, LIU Rui-hua2 （1. Navigation Research Center, Na Analyzing error characters of inertial sensors and modeling errors are important tasks when building Inertial Navigation Systems （INS） and effective ways to improve accuracy of INS. Non-stochastic error characters and error sources of a typical kind of MEMS gyroscope in structures and Comb-drive Tuning Fork Gyroscope （TFG） are researched. The effects of interfering torques are discussed from the aspect of two-order weakly damped control systems. The open-loop sensitivity of the gyroscope is focused on and its variation versus temperature, specific force and angle rate is brought forward to under some simplified conditions. Finally, the form of the non-stochastic error model is concluded and the conclusion is much helpful and instructional to modeling non-stochastic errors of TFG .

关 键 词：MEMS陀螺 非随机性误差 微电子机械系统 惯性导航 

分 类 号：V241.59[航空宇航科学与技术—飞行器设计]