混联复合机床转台定位精度的激光测量与补偿  

Laser measurement and error compensation for positioning accuracy of revolving stage on hybrid NC machine tools

作　　者：张立新[1] 黄玉美[1] 杨新刚[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院数控机床及机械制造装备集成教育部重点实验室,陕西西安710048

出　　处：《传感器与微系统》2006年第12期70-72,共3页Transducer and Microsystem Technologies

基　　金：教育部"高等学校博士学科点专项科研基金"资助项目(20050700007)

摘　　要：传统的数控机床进给轴定位精度的检测方法,存在精度低、方法落后、检验重复性差等缺点。因此,采用目前国际先进的激光干涉法检测混联复合机床转台的定位精度,以评价和提高其精度。对干涉仪的测量原理、测量方法和数据处理进行了分析,认为空气折射率是干涉仪应用中的主要误差来源,并分析了其原因和补偿方法。最后,给出了基于激光干涉仪的机床定位精度检测和补偿方案。The traditional positioning accuracy detection method of feed shaft for numerical control （NC） machine tool exists low accuracy, method obsolete and poor measurement repeatability. Therefore, positioning accuracy of revolving stage on hybrid NC machine tools is measured by using interferometer metering technique that is generally accepted at present in the world, in order to evaluate and improve the accuracy of revolving stage. The principle of measure, measuring method and data processing of the laser interferometer are analyzed. Air refractivity is thought as the main source of error during the application of laser interferometer, the reason and compensation method of errors are analyzed. The schemes of positioning accuracy detection and compensation of machine tools on laser interferometer are presented.

关 键 词：混联数控机床 转台 定位精度 检测 

分 类 号：TB92[一般工业技术—计量学] TN24[机械工程—测试计量技术及仪器]