射频磁控溅射制备类金刚石薄膜的特性  

PROPERTIES OF DIAMOND LIKE CARBON FILMS PREPARED BY RF MAGNETRON SPUTTERING

作　　者：赵之明[1] 李合琴[1] 顾金宝[1] 宋泽润[2] 

机构地区：[1]合肥工业大学材料科学与工程学院,安徽合肥230009 [2]中国电子科技集团公司43研究所,安徽合肥230022

出　　处：《真空与低温》2006年第4期215-218,237,共5页Vacuum and Cryogenics

基　　金：安徽省自然科学基金(03044703)资助

摘　　要：采用射频磁控溅射技术,用高纯石墨靶在单晶硅片、抛光不锈钢片上制备了类金刚石薄膜(DLC)。采用Raman光谱、原子力显微镜、显微硬度分析仪,表征了类金刚石薄膜的微观结构、表面形貌、硬度。结果表明,制备的类金刚石薄膜中含sp2、sp3杂化碳键,具有典型的类金刚石结构特征。计算表明,对应sp3杂化碳原子含量的ID1IG为3.18;薄膜的表面十分平整光滑,表面粗糙度极低,平均粗糙度Ra为0.17 nm;薄膜硬度可以高达30.8 GPa。Using radio frequency CRF） magnetron sputtering method, diamond-like carbon films （DLC） were deposited on polished stainless steel and silicon wafer substrates. Microstrueture, surface morphology and hardness of the films were investigated by Raman spectroscopy, AFM and micro-hardness instrument. The result shows that the film- s have sp^2, sp^3 bond and a 3.18 calculated ID/IC value relating to sp^3 bond content dould be obtainecl. The surface of the films is very flat and smooth and surface average roughness is 0.17 nm. The hardness of the films is up to 30.8 GPa.

关 键 词：射频磁控溅射 类金刚石薄膜 拉曼光谱 原子力显微镜 显微硬度 

分 类 号：TB43[一般工业技术]