用于微装配的三维微力传感器的研究  

Research on 3 Dimentional Micro Force Sensor for Micro Assembly

作　　者：陈海初[1] 张蕊华[2] 

机构地区：[1]浙江大学流体传动及控制国家重点实验室,浙江杭州310027 [2]南昌大学机电工程学院,江西南昌330031

出　　处：《压电与声光》2007年第3期280-282,共3页Piezoelectrics & Acoustooptics

基　　金：国家"八六三"基金资助项目(2003AA404190);浙江大学流体传动及控制国家重点实验室博士后专项基金资助项目;中国博士后科学基金资助项目(20060391049)

摘　　要：采用硅基应变片设计了一种可用于精密微装配作业过程,检测x、y、z方向微接触力的三维微力传感器;经微小改动后,该传感器可成为五维微力传感器。分析了力传感器测量原理,建立其测量模型,并设计了传感器信号放大电路。测试了微力传感器的性能指标,在x、y、z3个方向的微力测量分辨率为0.001 N,测量精度可达0.005 N,测量范围为-0.5^+0.5 N。最后设计了微装配作业控制系统,并利用该传感器实现力位移混合控制,顺利完成了180μm微型轴与200μm微型孔间的精密微装配实验研究。A square structure 3 dimentional micro force sensor by using silicon semiconductor is developed and could be changed into a 5 dimentional micro force sensor by only a small modifying. The sensor can be applied for the contact micro force measuring in the x, y and z directions in high precise micro assembly. The measuring principle of the sensor is analyzed, the measuring model is built up. Then the signal amplifying and processing circuits is designed. The tested characteristics of the micro force sensor are as following, the micro force measuring resolution is 0. 001 N in the x, y and z directions, the measuring precision is 0. 005 N, and measuring range is -0. 5~ ＋0.5 N. At last a micro assembly controlling system is developed, and the force-displacement hybrid control by using the sensor is realized to accomplish the research of micro assembly between a micro shaft （Ф180μm） and a micro spindle sleeve （Ф200μm）.

关 键 词：微力传感器 微装配 微力检测 微小机器人 

分 类 号：TP242.2[自动化与计算机技术—检测技术与自动化装置]