上海光源TSP&NEG复合电源的研制  

Development of TSP&NEG combosite controller for SSRF

作　　者：安双利[1] 蒋迪奎[1] 蒋罗荣 金建初 

机构地区：[1]中国科学院上海应用物理研究所 [2]上海三井真空设备有限公司,上海201708 [3]苏州凯特电子有限公司,江苏苏州215008

出　　处：《真空》2007年第4期72-74,共3页Vacuum

摘　　要：上海第三代同步辐射光源(SSRF)的动态真空要求为1.3×10-7Pa,要获得这样的超高真空环境,真空系统配置了多台钛升华泵(TSP)和非蒸散型吸气剂(NEG)组件,针对这两种设备的工作参数,研制了一种带有计算机通信接口的复合电源,并在LabVIEW环境下开发了一套相应的控制软件,实现了对TSP和NEG的本地和远程控制。经过测试,该控制器和控制软件均已达到了设计指标,可以正式投入到上海光源项目上使用。To acquire 1.3 × 10^-7Pa dynamic-pressure vacuum environment, the whole vacuum system comprises many sets of titanium sublimation pumps （TSPs） and non-evaporable getters （NEGs）. According to the process parameters required for the two components, a new composite power source with computer communication interface and a set of relevant control softwares based on LabVIEW were developed to implement both the local and remote control of TSPs and NEGs. The controller and its softwares have been running for the commissioning of a cellular prototype, and the results showed that they are reliable and stable to be applied to the photo source project SSRF.

关 键 词：超高真空 钛升华泵 非蒸散型吸气剂 复合电源 LabVIEW 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置] TN107[自动化与计算机技术—控制科学与工程]