不同量子阱宽度的InP基In_(0.53)GaAs/In_(0.52)AlAs高电子迁移率晶体管材料二维电子气的性能研究  

Subband electron properties of InGaAs/InAlAs high-electron-mobility transistors with different channel chickness

作　　者：高宏玲[1] 李东临[1] 周文政[2] 商丽燕[2] 王宝强[1] 朱战平[1] 曾一平[1] 

机构地区：[1]中国科学院半导体研究所,北京100083 [2]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083

出　　处：《物理学报》2007年第8期4955-4959,共5页Acta Physica Sinica

摘　　要：用Shubnikov-de Haas(SdH)振荡效应,研究了在1.4K下不同量子阱宽度(10-35nm)的InP基高电子迁移率晶体管材料的二维电子气特性.通过对纵向电阻SdH振荡的快速傅里叶变换分析,得到不同阱宽时量子阱中二维电子气各子带电子浓度和量子迁移率.研究发现,在Si掺杂浓度一定时,阱宽的改变对于量子阱中总的载流子浓度改变不大,但是随着阱宽的增加,阱中的电子从占据一个子带到占据两个子带,且第二子带上的载流子迁移率远大于第一子带迁移率.当量子阱宽度为20nm时,处在第二子能级上的电子数与处在第一子能级上的电子数之比达到了最大值0.24.此时有最多的电子位于迁移率高的第二子能级,材料的迁移率也最大.此结果对于优化器件的设计有重要意义.Magnetotransport properties of In0.53 GaAs/In0.52 AlAs high electron mobility transistor （HEMT） structures with different channel thickness of 10-35 nm have been investigated in magnetic fields up to 13 T at 1.4 K. Fast Fourier transform has been employed to obtain the subband density and mobility of the two-dimensional electron gas in these HEMT structures. We found that the thickness of channel does not significantly enhance the electron density of the two-dimensional electron gas, however, it has strong effect on the proportion of electrons inhabited in different subbands. When the size of channel is 20 nm, the number of electrons occupying the excited subband, which have higher mobility, reaches the maximum. The experimental values obtained in this work are useful for the design and optimization of InGaAs/InAlAs HEMT devices.

关 键 词：量子阱宽 二维电子气 Shubnikov-de Haas振荡 高电子迁移率晶体管 

分 类 号：O472.4[理学—半导体物理]