非制冷红外微测辐射热计有限元模型的构建  

Design of Uncooled Infrared Microbolometer Finite Elements Models

作　　者：甄志成[1] 胡明[1] 杨海波[1] 吕宇强[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《微纳电子技术》2007年第7期45-47,共3页Micronanoelectronic Technology

基　　金：国家自然科学基金(60371030);天津市自然科学基金(043600811)

摘　　要：根据微加工条件能够制造的单层和双层结构的非制冷红外微测辐射热计的尺寸,进行了有限元建模与分析,寻找出在可接受的性能与成本之间折衷的设计方案,指出气体热导是影响探测单元热导的一个主要因素,并对其进行了理论分析,给出减小气体热导的方法及这些方法在双层及单层结构中应用的可行性。According to the micro-process condition for fabricating uncooled infrared microbolometer with monolayer and double deck configurations, a finite element model was built and analyzed, a compromise design was proposed considering the acceptable performance and costs. It pointed out that gas thermal conductivity was the main factor influencing the thermal conductivity of sensor cell, and theoretical analyse was done. The ways to reduce the gas thermal conductivity were given, and the feasibility for use in the monolayer and double deck configurations was indicated.

关 键 词：微机电系统 微桥结构 微测辐射热计 红外成像 

分 类 号：TN362[电子电信—物理电子学]