氧化锌纳米结构的制备及其生长机理  

Synthesis and Growth Mechanism of One-dimensional ZnO Nanorods

作　　者：李玉国[1] 张秋霞[1] 王建波[1] 石礼伟[1] 

机构地区：[1]山东师范大学物理与电子科学学院半导体研究所,山东济南250014

出　　处：《半导体光电》2007年第4期540-543,共4页Semiconductor Optoelectronics

摘　　要：将利用射频磁控溅射技术在Si(111)衬底上沉积的锌膜进行热氧化后,得到一维ZnO纳米棒。采用X射线衍射(XRD)、扫描电子显微镜(SEM)、透射电镜(TEM)研究了ZnO纳米棒的结构及表面形貌。实验结果表明上述ZnO纳米棒具有六角纤锌矿结构。金属Zn从SiO2基质中析出和O2发生反应在薄膜表面形成低维ZnO纳米棒。讨论了退火温度及退火时间对ZnO纳米棒形成的影响,并对其生长机制作了初步的探讨。One-dimensional zinc oxide （ZnO） nanorods were synthesized by oxidating metal zinc thin films deposited on Si（111） substrates with radio frequency （RF） magnetron sputtering. X-ray diffraction （XRD）, scanning electron microscopy （SEM）, transmission electron microscopy （TEM） were employed to determine the structure and morphology of the nanorods. Results show that the synthesized ZnO nanorods have a hexagonal wurtzite structure. The metal zinc separated out from the silica substrate reacts with oxygen and produces the nanorods on the film surface. The influences of annealing temperature and annealing time on the formation of the ZnO nanorods are discussed,and the initial growth mechanism is given.

关 键 词：磁控溅射 纳米线 热氧化 退火 

分 类 号：TN304.21[电子电信—物理电子学]