Ti/TiN/TiC/DLC固体膜润滑特性实验研究  

Experimental investigation on lubrication behavior of Ti/TiN/TiC/DLC solid film

作　　者：李明[1] 王凤[1] 蔺增[1] 巴德纯[1] 

机构地区：[1]东北大学真空与流体工程中心,辽宁沈阳110004

出　　处：《真空》2007年第5期19-21,共3页Vacuum

基　　金：沈阳市科技基金(1053125-1-24);华中科技大学塑性成形模拟及模具技术国家重点实验室开放基金(06-9)

摘　　要：提出一种新型复合固体润滑膜,并讨论了该复合膜的结构和作用机理。复合结构的基本组成是传统硬质涂层TiN和TiC的结合,最上面的固体润滑膜是用射频等离子体增强化学气相沉积(RFPECVD)方法沉积的类金刚石(DLC)膜。分别用紫外拉曼光谱仪和扫描电子显镜分析薄膜的显微结构和表面形貌,用摩擦磨损实验机测定薄膜的摩擦学特性。结果表明,所制备的薄膜为类金刚石膜,薄膜表面含有大量的类石墨的sp2,能有效的担负固体润滑膜的功能。摩擦过程中产生的转移层也有助于减摩功能的实现。A new kind of composite solid film lubricants were developed, and their structures especially how they work are discussed. Basically they were a composite of the conventional hard coatings TiN and TiC, and the top layer is a diamond like carbon（DLC） deposited via radio frequency plasma enhanced chemical vapor deposition（RFPECVD）. The microstructure and morphology of the film were studied by UV-Raman spectroscopy and SEM, respectively, and the pin-on-disk tribometer was used to test the friction properties of the films. The result showed that the film prepared in this way is DLC, and a big amount of spz is contained in its surface to serve efficiently the lubrication function to which the transfer layer resulting from friction is also beneficial.

关 键 词：固体润滑膜 磨损保护膜 类金刚石膜 等离子体增强化学气相沉积 

分 类 号：TB79[一般工业技术—真空技术]