SPC在多品种小批量生产线的应用研究  

Application of SPC in Multi-Project and Small Batch Production Line

作　　者：徐岚[1] 刘嵘侃[1] 陈亚兰[1] 贾新章[2] 

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060 [2]西安电子科技大学微电子学院,西安710071

出　　处：《微电子学》2007年第5期682-684,共3页Microelectronics

摘　　要：统计过程控制(SPC)是一种有效的质量管理工具,但由于半导体制造工艺过程的复杂性,常规的SPC模型已经不能对工艺过程状态进行有效的监控。着重论述了SPC在多品种、小批量半导体生产线上的实际应用;根据工艺特点,选取正确的SPC模型,通过采集数据、绘制控制图和数据分析,对图中异常点采用5M1E进行分析,既可及时发现工艺异常并进行纠正,又可排除非工艺原因造成的异常。该方法对提高工艺稳定性和产品质量有着非常重要的意义。Practical application of SPC to multi-project and small quantity semiconductor production line was described in detail. Proper SPC models were selected depending on different processes. By collecting data, plotting control charts, and analyzing abnormal points in the chart with 5MIE, process abnormities could be detected and rectified, and abnormities induced by causes other than process could be eliminated, which is quite helpful for stabilizing process and improving product quality.

关 键 词：统计过程控制 质量控制 控制图 嵌套回归 

分 类 号：TN305.5[电子电信—物理电子学]