基于Laplace变换法的光电探测器频率响应研究  

Frequency Response Research of Photodetector by Laplace Transform

作　　者：卞剑涛[1] 程翔[2] 陈朝[1] 

机构地区：[1]厦门大学物理系,福建厦门361005 [2]厦门大学机电工程系,福建厦门361005

出　　处：《光子学报》2007年第10期1804-1807,共4页Acta Photonica Sinica

基　　金：科技部中国-白俄罗斯科技合作项目(CB7-2-10);福建省重大专项前期研究项目(2005HZ1017)资助

摘　　要：从光电探测器的基本方程出发,采用Laplace变换方法,分析了一种与CMOS标准工艺兼容的N-well/P-sub结构光电探测器的频率响应特性,780nm和650nm波长下的截止频率分别为14.4MHz和43MHz.该分析方法克服了频率特性测量中存在负载影响和采用渡越时间分析截止频率所存在的近似与作用不确定的问题,适用于各种PN以及PIN结构的光电探测器的频率特性研究.Depended on the basic equations of photodetector, the frequency response characteristic of a N- well/P-sub structure photodetector in standard CMOS technology is analyzed by the Laplace transform method. The intrinsic cut-off frequency of this photodetector is 14.4 MHz and 43 MHz in 780 nm and 650 nm wavelength,respectively. Usually,the photodetector bandwidth can only be approximately analyzed by transport time, whose reaction on the whole response time is uncertainty. Also the Laplace method avoids the influence of load circuits in frequency measurement. It is fit for the frequency response research of PN or PIN photodetector.

关 键 词：光电子学 光电探测器 LAPLACE变换 频率响应 CMOS工艺 

分 类 号：TN364.2[电子电信—物理电子学] TN302