反应溅射Ti(O,N)涂层的微结构与力学性能  

Microstructure and Mechanical Properties of Reactively Sputtered Ti(O,N) Coatings

作　　者：吴莹[1] 吴昕蔚[1] 李广泽[1] 李戈扬[1] 

机构地区：[1]上海交通大学金属基复合材料国家重点实验室,上海200030

出　　处：《表面技术》2007年第6期39-41,共3页Surface Technology

基　　金：国家自然科学基金项目资助(50571062)

摘　　要：采用反应磁控溅射方法在Ar、N2和O2混合气氛中制备了一系列Ti(O,N)涂层,并采用EDS、XRD、SEM、AFM和微力学探针研究了氧分压对涂层的化学成分、微结构和力学性能的影响。结果表明:随混合气氛中氧分压的提高,涂层中的氧含量逐步增加,氮含量相应减少,但涂层始终保持与TiN相同的NaC l结构。少量氧的加入,可以改善涂层的结晶状态,涂层的硬度也相应升高,明显高于未含氧的TiN涂层的硬度。氧含量为8.0%(原子数分数)时,涂层硬度达到最大值26.2 GPa。进一步增加氧含量,涂层的硬度基本保持不变。A series of Ti （ O, N ） coatings with different oxygen content were deposited by the reactive magnetron sputtering method in a gaseous mixture of Ar, N2 and O2. Energy dispersive spectroscopy, X-ray diffraction, scanning electron microscopy, atomic force microscopy and nanoindentation were employed to investigate the effects of oxygen partial pressure on chemical composition, microstructure and corresponding mechanical properties of Ti （ O, N ） coatings. Experimental results shows that with the increase of oxygen partial pressure, the oxygen content gradually increase in coatings and the nitrogen content decreased correspondingly. During the process, these coatings retained a similar NaC1 structure as TiN. Addition of a small amount of oxygen improves the crystallization of the coatings and enhances the hardness which is obviously higher than that of TiN coating. The maximum hardness of coatings is 26.2 GPa at 8.0 at.% O. Further increasing the oxygen content, the hardness of coatings keeps high hardness.

关 键 词：反应磁控溅射 Ti(O N)复合涂层 微结构 力学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG174.45[金属学及工艺—金属学]