沉积温度对非平衡磁控溅射MoS_2-Ti复合薄膜的结构与性能影响研究  

Study of Structure and Performance of Unbalanced Magnetron Sputtering MoS_2-Ti Coating Affected by Deposition Temperature

作　　者：周晖[1] 郑军[1] 温庆平[1] 桑瑞鹏[1] 万志华[1] 

机构地区：[1]兰州物理研究所表面工程技术国防科技重点实验室,甘肃兰州730000

出　　处：《润滑与密封》2007年第12期16-19,22,共5页Lubrication Engineering

基　　金：航天支撑技术项目(417010802).

摘　　要：采用非平衡磁控溅射沉积技术制备MoS2-Ti复合薄膜,研究了沉积温度对薄膜的结构和性能的影响。利用SEM、XRF和XRD分析薄膜的形貌、成分和晶相结构,用CSEM薄膜综合性能测试仪测试薄膜的硬度和与基底间的附着力,用球-盘摩擦试验机和真空环模系统评价薄膜的真空摩擦磨损性能。结果表明:沉积温度升高薄膜中S和Mo原子比从1.72升高至1.76,Ti质量分数从8.2%降低至6.7%,薄膜从明显的(002)基面优势取向向多晶态转变,晶粒尺寸变大,棱面膜含量增多;薄膜的硬度、与基底间的附着力都随沉积温度的升高而降低,沉积温度为200℃时薄膜性能降低明显,硬度从4GPa降至2GPa,薄膜与基底间附着力从80mN以上降至35mN;薄膜在真空环境中的减摩作用不受沉积温度影响,摩擦因数平均值为0.02,波动范围为0.01～0.04,薄膜耐磨寿命随沉积温度升高而降低,50℃和100℃薄膜耐磨寿命相差不多,200℃薄膜样品耐磨寿命很差,是50℃和100℃薄膜样品的1/8～1/7。MoS2-Ti composite coatings were deposited by unbalanced magnetron sputtering system, the effects of deposition temperature on the structure and mechanical performance of coating were studied. The coating morphology, composition and crystal structure were analyzed by using SEM, XRF and XRD, the coating nanohardness and adhesion force to substrate were measured by using CSEM nanoindentation and nanoscratch tester, the tribological properties of coating in vacuum environment were evaluated by using ball-on-disc friction and wear tester and vacuum simulation system. The results show that with the increase of deposition temperature, the ratio of S and Mo atom in the coating is increased from 1.72 to 1.76, Ti weight concentration is decreased from 8.2% to 6. 7%, and the coating structure is changed from predominant basal （002） planes orientation to polycrystalline,grain sizes and edge（100,110） planes are increased. The coating nanohardness and critical load are reduced with elevating deposition temperature, and when deposition temperature is 200 ℃, the mechanical properties of coating are decreased largely, the coating nanohardness is decreased from 4 GPa to 2 GPa, the critical load is decreased from above 80 mN to 35 raN. The change of deposition temperature has no effect on the lubricating properties of coating, average friction coefficient of the coating is 0. 02 and fluctuates between 0. 01 - 0. 04, the wear life of coating is reduced with the increase of deposition temperature, when deposition temperature is 200 ℃ ,the wear life of coating is 1/8 - 1/7 of the coatings prepared at the deposition temperature of 50 ℃ and 100 ℃.

关 键 词：非平衡磁控溅射 MoS2-Ti复合薄膜 沉积温度 结构和性能 

分 类 号：TH117[机械工程—机械设计及理论]