硅—蓝宝石高温大量程压力传感器设计  

Design of high temperature wide range silicon-on-sapphire pressure sensor

作　　者：闻化[1] 张爱平[1] 张枫[1] 高成臣[2] 姚东嫒[2] 

机构地区：[1]空军驻黑龙江地区军事代表室,黑龙江哈尔滨150001 [2]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2007年第12期97-99,共3页Transducer and Microsystem Technologies

摘　　要：介绍了一种硅-蓝宝石高温大量程压力传感器的设计，提出了采用小直径C型膜片的一体化结构，通过合理排布力敏电阻条位置，能够制作出高精度大量程压力传感器。采用该设计研制出了量程分别为60MPa和100MPa压力传感器，其工作温度范围为-50-350℃；满量程输出≥100mV；精度优于0．1％；迟滞与重复性均优于0．05％FS。The design of a kind of silicon-on-sapphire pressure sensor with high temperature and wide operation range is introduced. A small diameter compacted structure with C-shaped diaphragm is brought forward. Due to the properly arrangement of force sensitive resistances, high precision and wide operation range pressure sensor can be fabricated. By the design method,the pressure sensors with 60 MPa and 100 MPa operation range are studied and fabricated, hsoperation temperature is -50 -350℃;full scale output ≥100 mV; precision is better than 0.1% ; hysteresis and repeatability are better than 0.05 % FS.

关 键 词：硅-蓝宝石 压力传感器 结构设计 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]