MEMS硅微陀螺仪系统级建模与仿真研究  

System-level modeling and simulation on silicon MEMS gyroscope

作　　者：温佰仟[1] 刘建业[1] 李荣冰[1] 

机构地区：[1]南京航空航天大学导航研究中心,南京210016

出　　处：《中国惯性技术学报》2007年第4期485-487,共3页Journal of Chinese Inertial Technology

基　　金：航空科学基金资助项目(04D52030)

摘　　要：根据MEMS陀螺仪敏感哥式加速度、测量角速度的原理,建立MEMS陀螺系统级行为模型是分析MEMS陀螺仪内部的驱动、检测和信号解调等行为过程及改进陀螺整个系统的性能的重要方法。根据MEMS陀螺的动力学方程及其内部组成,将MEMS陀螺分成驱动电路、传感器、信号调理电路等三部分,建立了MEMS陀螺系统级模拟行为模型,运用相关检测技术对角速度信号进行了提取,并对模型进行了仿真验证。仿真结果验证了所设计模型的有效性,所建模型可以用于MEMS陀螺的特性和性能分析。Based on the principle of Coriolis acceleration sensing and the angular rate measurement, the system-level modeling for MEMS gyroscope behavior is an important method to analyze the behavior of its driving, detections and signal-demodulation, and to improve the system performance. According to the dynamics equation and its formation, the MEMS gyroscope is divided into three parts, that is, driving circuit, sensors, and signal demodulation circuit. A system-level analog behavioral model of MEMS gyroscope was established, and the input angular rate signal was extracted by using the method of correlation detection. The simulation results demonstrate the validity of the designed model. The designed model can be used to analyze the characteristics and performance of MEMS gyroscope.

关 键 词：微电子机械系统 陀螺 模拟行为模型 相关检测 PSPICE 

分 类 号：U666.1[交通运输工程—船舶及航道工程]