MOCVD过程中金属有机源(C_3H_7)_2Te和(CH_3)_2Cd热裂解机理质谱实时研究  

In situ Mass Spectroscopic Investigation of the Pyrolysis Mechanism of (C_3H_7)_2Te and (CH_3)_2Cd During MOCVD

作　　者：桑文斌[1] K.Durose A.W.Brinkman J.Woods 

机构地区：[1]上海大学嘉定校区无机材料系,201800 [2]Applied Physics Group,Department of Physics,Durham University,South Road,Durham

出　　处：《化学学报》1997年第6期578-584,共7页Acta Chimica Sinica

摘　　要：采用质谱技术实时研究了金属有机源DIPTe和DMCd在MOCVD反应器中热裂解的性质.着重分析了可能发生的气相反应及热裂解机理,并探讨了在CdTe,HgCdTe实际生长条件下两个有机源之间可能发生的相互作用及其对热裂解温度的影响.Pyrolysis properties of metallo - organic precursors, di - isopropyltelluride (DIPTe) and dimethylcadmium (DMCd), in a MOCVD reactor have been investigated by in - situ mass spectroscopy. In particular, possible gas phase reactions as well as pyrolysis mechanism are analysed. Interaction between the two precursors and its influence on pyrolysis temperature are explored under the CdTe, CdTe growth conditions.

关 键 词：半导体化合物 碲化镉 汞 MOCVD 热裂解 质谱 

分 类 号：TN304.25[电子电信—物理电子学] TN304.052