可靠性预计模型  

Model of Reliability Prediction

作　　者：熊继军[1] 高健飞[1] 郭涛[1] 范波[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,太原030051

出　　处：《纳米技术与精密工程》2007年第4期285-288,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金重点项目(50775209/E052502)

摘　　要：微加速度计是集微电子与机械于一体的加速度敏感元件.微加速度计的应用越来越广泛,但是其可靠性问题成为制约微加速度计市场化的关键因素.为了预计压阻式微加速度计的可靠性,分析了一个完整的压阻式微加速度计,它由加速度计微结构、键合引线以及封装管壳等构成;讨论了加速度计的主要失效类型——由芯片材料缺陷以及工艺缺陷导致的内部失效以及由封装失效和内外引线失效导致的外部失效;详细论述了影响压阻式微加速度计可靠性的主要因素,并在此基础上建立了微加速度计的可靠性预计模型.The microaccelerometer used to sense acceleration is an aggregation of microelectronics and mechanics. Its application will be more and more extensive, but reliability restricts the market development of the accelerometer. In order to predict the reliability of the piezoresistive microaccelerometer, the structure of microaccelerometer composed of microstructure, bonding wire and package, was analyzed; and the main failure types of the microaccelerometer, including internal failure induced by material or process flaws and external failure induced by package or inward-outward bonding wire flaws, was studied. Furthermore, the main factors of reliability of the piezoresistive accelerometer were discussed in detail to establish the model of reliability prediction of the microaccelerometer.

关 键 词：微加速度计 可靠性 预计模型 失效率 

分 类 号：TH824.4[机械工程—仪器科学与技术]