光刻用有机金浆研究  

Organic Gold Ink for Photo Fabrication

作　　者：郎彩[1] 李世鸿[1] 张樱[1] 杜红云[1] 

机构地区：[1]昆明贵金属研究所

出　　处：《电子元件与材料》1997年第5期27-30,共4页Electronic Components And Materials

摘　　要：光刻有机金浆是以金的树脂酸盐为主，配以有关的贵、贱金属的树脂酸盐等制成。这种浆料分散性好，纯度高，烧制成的金膜薄而致密，覆盖率高，光刻出的图形边沿整齐，分辨率高，附着力好，可以制作出较精密的线路，对于厚薄膜难于满足的一些性能得到了实现和提高。对我国电子工业发展将会起到一定的积极作用。Organic gold ink for photo fabrication is based on gold resinate with the addition of some other precious and/or base metals resinate. The advantages of this ink are the good dispersity, high purity, thin and high density fired film, high coverage, clean cut pattern edges, high resolution and high adherence. With these advantage, a precise circuit can be made and some performances can be achieved, which is difficult otherwise.

关 键 词：有机浆料 树脂酸盐 光刻 金 集成电路 

分 类 号：TN405.7[电子电信—微电子学与固体电子学] O614.123[理学—无机化学]