基于PI衬底的柔性MEMS电容式触觉力传感器设计与制作  

Design and Fabrication of the Polyimide-Based Flexible MEMS Capacitive Tactile Force Sensor

作　　者：肖素艳[1] 车录锋[1] 李昕欣[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室

出　　处：《传感技术学报》2008年第2期280-283,共4页Chinese Journal of Sensors and Actuators

基　　金：国家高技术研究发展计划项目资助(2003AA404090)

摘　　要：论述了一种可应用于机器人或医学修补技术的触觉传感器及其在旋涂的柔性聚酰亚胺衬底的新制作方法。该传感器是由多层无机和有机薄膜组成的柔性薄膜结构。结合传感器结构特点及各结构层材料的加工性能,进行工艺优化整合。尤其首次在载体硅片与PI衬底之间引进PDMS分离层,使得柔性器件的分离工艺大大简化。最后得到一种简单、低廉且与常规MEMS技术兼容的工艺。所制的传感器结构轻薄,可挠性好,且能贴附在任意形状的物体表面同时实现法向力和切向力的测量。This paper presents a new capacitive tactile sensor for robotics or prosthetic applications and introduces a new flexible MEMS technique to fabricate it on liquid spin-coated polyimide substrate. The sensor structure consists of organic and inorganic multilayer thin films. The process was properly integrated according to the structure characteristic of sensor and its materials processable properties of the sensor, and the optimized process is simple, cost-effective and compatible with common MEMS technology. Especially, the first introduction of the PDMS interlayer film between the carrier and the polyimide substrate greatly facilitates the separation of the polyimide-based flexible capacitive tactile sensor. The finished sensor is smart, robust, twistable, and it can be attached on the arbitrary shape surfaces for the simultaneous measurement of both normal and shear force.

关 键 词：柔性MEMS 触觉传感器 聚酰亚胺(PI) 聚二甲基硅氧烷(PDMS) 

分 类 号：TP212.6[自动化与计算机技术—检测技术与自动化装置]