微型MEMS皮拉尼计研究  

Research on Micromachined Pirani Gauge

作　　者：周吉龙[1] 陈肯乐[1] 张锦文[1] 金玉丰[1] 

机构地区：[1]北京大学微电子研究所,微米/纳米加工技术国家重点实验室,北京100871

出　　处：《传感技术学报》2008年第3期513-516,共4页Chinese Journal of Sensors and Actuators

摘　　要：介绍了一种用于检测真空密封腔体内真空度的器件——微型MEMS皮拉尼计。皮拉尼计是利用真空腔体内微小间隙间的热传导来检测真空度的[1]。本文设计了一种微型MEMS横向皮拉尼计,结构非常简单,并利用浓硼扩散和键合技术实现了该横向MEMS皮拉尼计,制造工艺仅需3张光刻版。其试验结果显示该皮拉尼计在10Pa～300Pa范围内热阻系数与真空度呈很好的线性关系。This paper reports a novel microelectromechanical systems （MEMS） device--Micromechined Pirani Gauge--which is used to monitor pressure changes in vacuum package. This Pirani Gauge utilizes heat conduct in a small gap between the silicon heater and heat sinks to monitor pressure. A lateral micromachined Pirani Gauge with a simplified structure was designed and prepared using dissolved wafer process and bonding technology. The experiment results show our lateral micromachined Pirani Gauge has a very good linearity of thermal impedance versus pressure in the range of 10 Pa - 300 Pa.

关 键 词：MEMS 真空封装 皮拉尼计 真空度测试 

分 类 号：TN107[电子电信—物理电子学]