AlGaN/GaN型气敏传感器对于CO的响应研究  

A Carbon Monoxide Gas Sensor Based on an AlGaN/GaN Structure

作　　者：冯春[1] 王晓亮[1] 王新华[1] 肖红领[1] 王翠梅[1] 胡国新[1] 冉军学[1] 王军喜[1] 

机构地区：[1]中国科学院半导体研究所,北京100083

出　　处：《Journal of Semiconductors》2008年第7期1387-1390,共4页半导体学报（英文版）

基　　金：中国科学院知识创新工程(批准号:YYYJ-0701-02);国家自然科学基金(批准号:60576046;60606002);国家重点基础研究发展规划(批准号:2002CB311903;2006CB604905;513270505)资助项目~~

摘　　要：研究了基于AlGaN/GaN型结构的气敏传感器对于CO的传感性.制备出AlGaN/GaN型气敏传感器器件,并测试得到了器件在50℃时对于不同浓度(1%,9000,8000,5000和1000ppm)的CO的响应情况;测试并分析了1%CO在50和100℃下响应度的差异,计算了通入1%CO前后器件的肖特基势垒高度的变化和灵敏度随电压的分布关系.结果表明,器件的灵敏度强烈依赖于器件的工作温度和通入的气体浓度,随着温度和浓度的增加,器件的灵敏度呈单调增加,器件在100℃空气气氛中表现出了良好恢复性能.This paper reports gas sensors based on an AlGaN/GaN structure for CO detection. The devices have been fabricated and showed remarkable sensitivity at measured temperatures. Response characteristics of the devices have been measured under different CO concentrations （1% ,9000ppm, 8000ppm, 5000ppm, 1000ppm） at 50℃. For the sake of comparison, the response of the device in- duced by 1% CO at 100℃ has also been measured. The sensitivity and variation of Schottky barrier height induced by 1% CO have been calculated at 50℃ and 100℃, respectively. Finally, the sensitivity strongly depends on the temperature and the CO concentration and increased as the temperature and concentration increased.

关 键 词：ALGAN/GAN CO 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]