精密微位移工作台的设计与性能分析  

Design and Performance Analysis on Precise Micro-displacement Working Table

作　　者：李蓓智[1] 杨永金[1] 杨建国[1] 张家梁[1] 徐源[1] 

机构地区：[1]东华大学机械工程学院,上海201620

出　　处：《机械设计与研究》2008年第4期41-43,53,共4页Machine Design And Research

基　　金：上海市重点学科建设资助项目(B602);上海市科技攻关资助项目(041111007)

摘　　要：在微位移技术中,柔性铰链是实现微位移和高分辨率的理想机构。结合精密磨床工作台高精度、高分辨率和大刚度的特点,以及满足工作台的工作行程和进给稳定性要求,设计了宏微两级精密进给机构;建立了柔性铰链导向机构的理论模型并进行刚度分析;详细给出了柔性铰链的参数设计、有限元分析和疲劳寿命分析。As for micro-displacement technology, flexure hinge is an ideal mechanism to achieve micro-displacement and high resolution. This paper combines the working table of precise grinding machine with its characters of high accuracy, high resolution and stiffness, morder to meet the demands of both the working process and the feed stability, the macro and micro precise feel mechanism is designed. The model of the flexure hinge is introduced and the analysis of its stiffness is given. Then the design of flexure hinge, finite element and fatigue life analysis are described in detail.

关 键 词：微位移 柔性铰链 压电陶瓷 有限元分析(FEA) 

分 类 号：TH703.8[机械工程—仪器科学与技术] TH112.5[机械工程—精密仪器及机械]