大口径多光谱ZnS头罩的研制  

Fabrication of large diameter multi-spectrum ZnS dome

作　　者：霍承松[1] 杨海[1] 付利刚[1] 石红春[1] 鲁泥藕[1] 赵永田[1] 魏乃光[1] 孙加滢[1] 余怀之[1] 苏小平[1] 

机构地区：[1]北京有色金属研究总院北京国晶辉红外光学科技有限公司,北京100088

出　　处：《红外与激光工程》2008年第4期719-722,共4页Infrared and Laser Engineering

摘　　要：多光谱ZnS是一种综合性能优异的红外光学材料,在长波红外及多波段红外探测成像系统中被广泛应用。化学气相沉积和热等静压后处理是制备多光谱ZnS材料的关键技术。介绍了化学气相沉积工艺和热等静压处理工艺制备多光谱ZnS的工艺原理及沉积大口径头罩的结构设计;报道了研制成功的270mm大口径多光谱ZnS头罩。经测试分析,头罩的全波段透过率均已接近理论水平、吸收系数≤0.01cm-1、折射指数均匀性达到2.2×10-5、硬度160kg/mm2、抗弯强度70MPa、断裂韧性1.0MPa·m1/2。与美国Rohm&Haas公司的多光谱ZnS产品相比,该头罩的主要性能指标与其处于同一水平。Multi-spectrum ZnS is an infrared optical material with high synthesis performance,and widely applied in infrared detecting imaging system for long wave and multi-spectrum. The key techonlogies of chemical vapor deposition and hot isolated pressing for fabrication of large-diameter multi-spectrum ZnS dome were discussed. Large diameter of 270 mm multi-spectrum ZnS dome was successfully made by chemical vapor deposition process and post-treatment of hot isolated pressing.The main properties of dome sample were measured and analyzed. The full-waveband transmission was close to the theory level,bulk absorption coefficient was less than 0.01 cm^-1,homogeneity of refractive index reached 2.2×10^-5,while hardness was 160 kg/mm2,rupture modulus strength was 70 MPa,and fracture toughness was 1.0 MPa·m^1/2. The experimental results show that the properties of large diameter multi-spectrum ZnS dome are in the same level with foreign products.

关 键 词：多光谱ZnS 大口径 头罩 

分 类 号：TN213[电子电信—物理电子学]