MEMS陀螺正交误差分析与仿真  

Analysis and simulation of quadrature error on MEMS gyroscope

作　　者：温佰仟[1] 刘建业[1] 李荣冰[1] 

机构地区：[1]南京航空航天大学导航研究中心,江苏南京210016

出　　处：《传感器与微系统》2008年第9期82-84,88,共4页Transducer and Microsystem Technologies

基　　金：国防科技预研基金资助项目(9140A090207)

摘　　要：针对MEMS陀螺由于机械耦合引起的正交误差,建立了包含误差的MEMS陀螺动力学方程,在开环检测和闭环检测情况下,分别对正交误差进行了分析,并通过相关检测技术抑制正交误差对陀螺性能的影响,提取出角速度信息。运用Simulink对陀螺进行了建模仿真,仿真结果表明:在开环检测和闭环检测情况下都能够有效消除正交误差的影响,由此验证了理论分析的正确性。Aimed at quadrature error induced with mechanical coupling, the dynamic equations of MEMS gyroscopes including error are given, under the condition of open loop detection and closed loop detection quadrature error is analyzed separately. Effect of quadrature error on MEMS gyroscope performance is inhibited and the input angular rate signal is extracted by using the method of correlation detection. Simulink is used on the modeling and simulation of gyroscope, the simulation results show that the effect of quadrature error can be eliminated effectively under the condition of open loop detection and closed loop detection. Hence, the validity of the theoretical analysis is verified.

关 键 词：微电子机械系统 陀螺 正交误差 机械耦合 平均化分析方法 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]