高精度微光学器件激光直写光刻系统研究  

High Precision Laser Direct Writing System for Micro-optical Device

作　　者：杨特育[1] 

机构地区：[1]合肥学院双实中心,安徽合肥230022

出　　处：《现代电子技术》2008年第24期20-23,共4页Modern Electronics Technique

摘　　要：设计一套高精度激光直写光刻系统,它采用带17位增量式编码器的松下MINAS A系列交流伺服马达,同时还采用基于高精密滚珠丝杆和超精密线性滑轨导向的x-y运动平台,可以实现约30 nm的运动控制灵敏度。针对该系统开发一套基于ISA总线的三维运动控制卡。实验表明该激光直写光刻系统完全能够满足光刻精度的要求,并且具有控制简单、行程轨迹精确等特点,适用于许多微光学器件加工领域。A high precision laser direct writing system is designed, which emploies MINAS A serials alternating current servo motors with 17 hit optocoders from corporation,a x-y movement platform with high precision ball thread and linear slid guiders to ensure a movement precision near 30 nm. A three -dimensional movement control board for the system based on ISA bus is developed, the laser direct writing system meet well the precision requirement for lithography. At the same time, the system possesses many merits such as easy of operation and so on. Therefore,it can be used widely for the fabrication of different kinds of MOEMS chips.

关 键 词：激光直写系统 光刻 交流伺服电机 ISA 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]