双岛五梁式微加速度传感器的动态响应研究  

Research on dynamic response of twin-island and five-beam typed micro acceleration sensor

作　　者：杨文硕[1] 严迪新[1] 

机构地区：[1]苏州科技学院电子与信息工程学院,江苏苏州215011

出　　处：《机械设计》2008年第12期8-10,47,共4页Journal of Machine Design

基　　金：苏州科技学院基金资助项目(Z910)

摘　　要：用模态分析的理论和方法对离散的双岛五梁式微加速度传感器整体结构模型进行了动态响应仿真分析。根据设计需要,对结构施加了平峰阻尼;并对在不同阻尼比条件下结构的动应力及变形进行了分析,给出了改善结构动态特性的阻尼比及工作梁表面动应力的分布规律和数值;确定了传感器不受复杂模态干扰的工作频带;为合理设计传感器的结构给出了动态设计依据。Using the theory and method of modality analysis the dynamic response simulative analysis on the whole structured model of the discrete twin-island and five-beam typed micro acceleration sensor was carried out. The flat-peak damping was exerted onto the structure according to the requirements of design, and the analysis of dynamic stress and deformation was carried out on the structure under different conditions of damping ratios. The damping ratio for improving the dynamic property of structure and the distribution law and numerical value of dynamic stress of the working beam surface were given out, thus the working frequency range of the sensor that didn＇ t receive disturbance of complex modality was determined and the basis of dynamic design was presented for designing rationally the structure of sensor.

关 键 词：双岛五梁 微加速度传感器 动态响应 阻尼比 动应力 

分 类 号：TB936[一般工业技术—计量学]