静电梳齿执行器分辨率和稳定性分析  

Analysis on Resolution and Stabilty of Electrostatic Comb Micro-Actuator

作　　者：刘恒[1,2] 苏伟[2] 何晓平[2] 张富堂[2] 

机构地区：[1]重庆大学通信工程学院,重庆400030 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《传感技术学报》2009年第1期34-37,共4页Chinese Journal of Sensors and Actuators

基　　金："十五"国防预研项目资助

摘　　要：通过探讨典型的静电梳齿执行器的分辨率和稳定性的机理,揭示目前研究的典型等高度静电梳齿执行器的横向位移与驱动电压具有非线性关系,分辨率存在线性度差的问题。鉴于目前大多数通过增加梳齿结构平面复杂度来改善分辨率的方法存在的微制造困难,本文提出在不显著影响横向位移的条件下通过改变梳齿结构高度来改善分辨率的方法,事例仿真结果验证了梳齿变高度方法对改善分辨率的有效性,同时得到在梳齿变高度条件下静电梳齿执行器的稳定性有细微的下降的结论。Electrostatic comb micro-actuator is widely used in all kinds of MOEMS, this paper investigates the resolution and stability of the typical electrostatic comb micro-actuator, it is found that the nolinear relation between applied voltage and lateral displacement, so its resolution is nonlinear. The existing methods to deal with the nonlinear problem of the resolution are almost by increasing the comb plane complexity , which bring to some impracticable fabriacted difficulty. Without increasing the comb plane complexity and remarkably decreasing the lateral displacement of active comb , this paper provides a new method to improve the problem for the typical electrostatic comb micro-actuator by changing the height of the comb, also, investigates the stability of the comb micro-actuator on the improved condition. The simulation verifies the method is availability and feasible to deal with the resolution nonlinear problem but the stability is slightly decline.

关 键 词：静电梳齿微执行器 分辨率 变高度 非线性 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]