ZnSe基底7～14μm波段宽带增透膜  

Study on High Performance Infrared Wide-band (7～14μm) Anti-reflective Film on ZnSe Substrate

作　　者：闫兰琴[1] 张树玉[1] 黎建明[1] 杨海[1] 苏小平[1] 余怀之[1] 刘嘉禾[1] 刘伟[1] 

机构地区：[1]北京有色金属研究总院国晶辉红外光学科技有限公司,北京100088

出　　处：《激光与红外》2009年第2期210-212,共3页Laser & Infrared

摘　　要：简要叙述了7～14μm波段红外增透膜的膜料选择以及硒化锌基底上高性能红外增透膜的设计和工艺研究。介绍了离子辅助沉积技术沉积该膜的的工艺过程。给出了用该方法制备的7—14μm波段宽带减反射膜的实测光谱曲线，其峰值透过率高达98％以上，在设计波段范围内平均透过率大于97％，膜层附着性能好，光机性能稳定。这对于红外光学系统的应用具有十分重要的意义。The selection of materials, design and deposition of the waveband 7 - 14μm infrared antireflection on ZnSe substrate by ion beam assisted deposition are reported. The measured spectral curves of the antirefleetion film at 7 - 14μm deposited by this method are given. The experimental results show that the peak transmission of the film is more than 98%, the average transmission in the designed wavelength range is greater than 97%, the film adherence is good, the optical and mechanical properties are stable. These are critical for the application of infrared optical systems.

关 键 词：ZnSe基底 红外宽带增透膜 优化 离子辅助沉积技术 

分 类 号：O484[理学—固体物理]