衍射微透镜列阵的研究与应用  

Study and application of diffractive microlens array

作　　者：杜春雷[1] 周礼书[1] 邱传凯[1] 白临波[1] 王永茹[1] 邓启凌[1] 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室

出　　处：《光学技术》1998年第3期17-19,22,共4页Optical Technique

摘　　要：本文研究了衍射微透镜列阵的设计与制作工艺方法，在此基础上研制出一系列衍射微透镜列阵，衍射效率均大于８５％，在深紫外、可见及红外波前传感器中得到了成功应用。The design, fabrication and evaluation method for the diffractive microlens array have been studied, based on the research achievement, a series of diffractive microlens array have been manufactured with the diffractive efficiency larger than 85%, those elements have been successfully used in different wavefront sensors.

关 键 词：衍射透镜 衍射效率 激光直写 刻蚀 微透镜列阵 

分 类 号：TH74[机械工程—光学工程]