大角度离子注入机控制系统软件设计  

Design of the Large Tilt Ion Implanter Control System Software

作　　者：罗宏洋[1] 孙勇[1] 王玮琪[1] 

机构地区：[1]中国电子科技集团公司电子第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2009年第2期19-23,共5页Equipment for Electronic Products Manufacturing

摘　　要：大角度离子注入机的控制系统具有控制部件和控制算法复杂、支持SEMI自动化软件标准等特点,通过优化软件结构和关键控制算法,成功实现控制系统设计和GEM标准组件设计,测试证明软件自动化程度高、稳定、可靠。Control system of the large tile ion implanter is characterized by complicated control components and control algorithms, and also it must be supported by the SEMI Automation Software Standards. The control system and the GEM components are successfully designed by optimized the structure and the key control algorithms of the software, the final test has proved that the software is full automation, and runs steadily and reliably.

关 键 词：大角度离子注入机 软件结构 SEMI自动化软件标准 

分 类 号：TN305.3[电子电信—物理电子学]