超光滑表面清洗技术发展研究  

Study of Development for Cleaning Technology of Super Smooth Surface

作　　者：张晋宽[1] 滕霖 王宇 

机构地区：[1]中国一航飞行自动控制研究所,西安710065

出　　处：《航空精密制造技术》2007年第2期11-14,共4页Aviation Precision Manufacturing Technology

基　　金：国防"十一五"装备预先研究项目(513180201)

摘　　要：介绍了超光滑表面清洗的基本理论,指出了当前超光滑表面清洗中存在的问题,系统分析了现有清洗技术的原理和清洗效果,并指出清洗技术的发展趋势。With the constant improvement of quality request about smooth surface, cleaning technology has become important technology in super smooth surface manufacture. It is introduced the elementary theory of super smooth surface cleaning, pointed out the problems existing in current cleaning process, systematically analyzed the principle and the effect of the current cleaning technology, and summarized the development trend of cleaning technology, which will provide the reference for choosing appropriate cleaning technology.

关 键 词：清洗技术 超光滑表面 湿法清洗 干法清洗 

分 类 号：TN305.2[电子电信—物理电子学]