用金刚石薄膜制造X射线掩模版  

FABRICATION OF X-RAY MASK BY USING DIAMOND MEMBRANE

作　　者：张文华[1] 丁桂甫[1] 王谦[1] 许俊涛[1] 张寿柏[1] 

机构地区：[1]上海交通大学信息存储研究中心

出　　处：《微细加工技术》1998年第1期37-42,共6页Microfabrication Technology

摘　　要：用金刚石薄膜作为支撑层，金作为吸收体；同时，采用Ｎｉ合金过渡层来解决金刚石与金之间结合力小，热匹配性能差等问题。制作的掩模版具有较好的反差效果。同时，还具有工艺简单，成品率高等特点。Fabrication of X-ray mask is the key of LIGA technique. In our design,dia- mond membrane is used as a sustaining membrane, and gold as absorbing struc- ture. In order to enhance the bonding force between the sustaining membrane and absorbing structure,a thin film interlayer of Ni alloy is used. The mask has good contrast. The process is simple and the rate of finished products is high. Thus, it can be concluded that using diamond membrane to fabricate LIGA mask is a good method.

关 键 词：LIGA X射线掩模版 金刚石薄膜 掩模 

分 类 号：TN304.18[电子电信—物理电子学] TN305.7