半导体制造批量计划调度问题的量子粒子群算法研究  

Research on the batch scheduling problem in semiconductor-manufacturing based on quantum particle swarm algorithm

作　　者：宋书强[1] 叶春明[1] 

机构地区：[1]上海理工大学管理学院,上海200093

出　　处：《机械设计与制造》2009年第6期6-8,共3页Machinery Design & Manufacture

摘　　要：对半导体制造批量计划调度问题进行研究,提出了一种收敛速度快、全局性能好、不易陷入局部最优的智能迭代算法-量子粒子群算法来实现对该问题的求解。该算法采用0-1编码方式,来实现对lot的分批和分配,并以最小完工时间为目标函数值进行寻优。最后通过具体算例,对该算法进行了仿真验证,结果表明,在求解半导体制造批量计划调度问题时,量子粒子群算法要优于二级蚂蚁算法、DSH算法,从而验证了该算法的可行性和有效性。To study the batch scheduling problem in Semiconductor-manufacturing,we use quantum particle swarm optimization,QPSO）to solve this problem,which have the good convergence speed,good performance in searching global optimum and good performance in avoiding trapping in the local optimum. We finish the batches and distribution of the lot by using a 0-1 coding, and we search the optimization far the target of minimum the completion time. Finally we use a practical analyses to confirm the performance of the method. The results show that QPSO is effective in solving the problem. The results of simulation indicate that QPSO perform better than the art-algorithm and DSH algorithm.

关 键 词：量子粒子群算法 批量调度 半导体制造 

分 类 号：TH12[机械工程—机械设计及理论] TP18[自动化与计算机技术—控制理论与控制工程]