光学级金刚石自支撑膜及其镀制Y_2O_3增透膜后的高温抗氧化性  

Oxidation properties of optical grade CVD free-standing diamond film and Y_2O_3/Diamond/Y_2O_3 films

作　　者：郭会斌[1] 吕反修[1] 李成明[1] 黑立富[1] 王耀华[1] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083

出　　处：《材料热处理学报》2009年第3期1-5,共5页Transactions of Materials and Heat Treatment

基　　金：国家自然科学基金(50572007);教育部博士点基金(20040008018)

摘　　要：为了提高金刚石膜的红外透过率和高温抗氧化性能,采用纯钇(Y)金属靶,使用直流反应磁控溅射法在光学级金刚石自支撑膜表面制备了Y2O3薄膜。对比研究了光学级金刚石自支撑膜和Y2O3/Diamond/Y2O3复合窗口的高温抗氧化性能,及氧化前后样品表面形貌和红外透过率的变化情况。热分析、扫描电子显微镜和傅立叶变换红外光谱仪的研究结果表明Y2O3薄膜对光学级金刚石膜有非常好的抗氧化防护性能,在高达950℃的温度暴露30s后对光学级金刚石膜表面没有造成明显损伤,且仍能保持良好的增透效果(透过率超过80%)。Yttrium oxide （Y2O3） thin films with smooth surfaces were prepared on optical grade chemical vapor deposition（CVD） lree-standing diamond film to improve the infrared optical properties and oxidation resistant properties of the diamond film by direct current reactive magnetron sputtering of high purity Y target. The oxidation of the diamond film was studied by TG-DSC analysis. The effect of oxidation on surface morphology and IR transmission spectrum of the diamond film and Y2O3/Diamond/Y2O3 was investigated by SEM and FTIR. It was demonstrated that the diamond film with Y2O3 thin film coatings can be protected from oxidation up to 950℃ for 30s, whilst the effect of transmission enhancement was still maintained （ 〉 80% ）.

关 键 词：化学气相沉积(CVD) 金刚石自支撑膜 Y2O3薄膜 抗氧化性能 

分 类 号：TG132.5[一般工业技术—材料科学与工程]