检测电压对一种新型谐振式微加速度计的影响  

The Influence of the Sensing Voltage for a Novel Type Resonant Micro-Accelerometer

作　　者：刘恒[1,2] 张富堂[2] 张凤田[2] 何晓平[2] 苏伟[2] 

机构地区：[1]重庆大学通信工程学院,重庆400030 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《传感技术学报》2009年第9期1261-1265,共5页Chinese Journal of Sensors and Actuators

基　　金：国防预研项目资助;中国工程物理研究院科学技术发展基金资助(2009B0403044)

摘　　要：静电作用在在平行板电容器上会产生等效静电负刚度,介绍了基于静电刚度的谐振式微加速度计设计原理,建立了其动力学模型。根据检测电压的约束条件,求解了其可行范围。同时分析了检测电压对系统灵敏度、可靠性和量程及输出电压的影响。分析结果表明:检测电压越大,灵敏度越大,但可靠性和量程会相应减少,反之亦然;直流检测电压的存在使得输出电压不受检测电容并行的寄生电容影响。理论分析结果为谐振式微传感器的系统设计提供了重要依据。According to the principle of the parallel plate capacitor with electrostatic occurs the electrostatic negative stiffness. A new type resonant micro-accelerometer is designed based on electrostatic stiffness. A dynamic model was built for the micro-accelerometer. The analytical result demonstrated the linear relationship between the frequency and acceleration. The sensing voltage range was also computed under the restriction. Subsequently, the influence of the sensing voltage for the sensitivity measurement range and output voltage was discussed. The result shows that the sensitivity non-linearly increasing with the sensing voltage increasing, but decreasing for the reliability. The output voltage is un-related to the parasitic capacitor with the existing of the DC sensing voltage. The all result is benefit to the novel type micro-accelerometer design.

关 键 词：微机械电子系统 微加速度计 检测电压 静电刚度 

分 类 号：TN216[电子电信—物理电子学]