切削刀具测温传感器SiO_2多层复合绝缘薄膜的制备及其性能表征  

Preparation and characterization of SiO_2 multilayer composite insulating film for cutter temperature measurement sensor

作　　者：崔云先[1,2] 杨德顺[2] 孙宝元[1] 贾颖[2] 徐军[3] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024 [2]大连交通大学机械工程学院,辽宁大连116028 [3]大连理工大学三束国家重点实验室,辽宁大连116024

出　　处：《功能材料》2009年第11期1850-1852,1856,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50675026);辽宁省自然科学基金资助项目(20062143);辽宁省教育厅高等学校科技计划资助项目(05L023)

摘　　要：利用双放电腔微波ECR等离子体增强非平衡磁控溅射技术成功制备了切削刀具测温传感器的SiO2多层复合绝缘薄膜,研究了SiO2多层复合绝缘薄膜的制备工艺。通过扫描电镜、原子力显微镜、台阶仪和XPS对SiO2功能薄膜的表面形貌、膜厚及成分进行了观测,结果表明,制备的多层复合SiO2薄膜厚度小、绝缘性好,绝缘电阻达到9.5×1012Ω。其与金属基体结合力可达16.7N,满足制作切削刀具测温传感器的要求。SiO2 multilayer composite insulating film for cutting measurement temperature sensor was prepared by means of advanced twinned microwave ECR plasma source enhanced radio frequency （RF） reaction non-balance magnetron sputtering technique. Preparation technology for the SiO2 film was studied. Micro-morphology, depth and compositions of SiO2 film was investigated by SEM, AFM, step profiler and XPS. The results showed that SiO2 thin-film posess small depth and excellent insulating property （insulation resistance reached 9.5×10^12Ω）. Binding force between the SiO2 thin-film and metal substrate was 15.8 and 16.7N. It may meet the demands of preparing the cutter measurement temperature sensor.

关 键 词：切削刀具 测温传感器 SiO2绝缘薄膜 多层复合 磁控溅射 

分 类 号：TH811.1[机械工程—仪器科学与技术]